Development and Characterization of DC Magnetron sputtered NiCrAlY Substrates

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A Transmission Electron-Microscopy Study of RF-Magnetron-Sputtered and DC-Magnetron-Sputtered Thin-Film Chromium and Chromium Platinum Coatings

Microstructural features of sputtered chromium and chromium-50 wt. % platinum thin films on carbon substrates are presented. Films produced by rf sputtering and dc magnetron sputtering are compared using analytical electron microscopy techniques. All rf-sputtered films are uniform in chemistry and thickness and are amorphous. The chromium film became crystalline with a grain size ofless than 10...

متن کامل

Synthesis and Characterization of DC Magnetron Sputtered ZnO Thin Films Under High Working Pressures

ZnO thin films were deposited on glass substrates using direct current (dc) magnetron sputtering under high working pressures. A pure zinc target was used, and sputtering was carried out in an oxygen atmosphere. The working pressure was varied between 50-800 mTorr. XRD characterization showed that for a window of working pressures between 300-500 mTorr, the deposited films were polycrystalline,...

متن کامل

CHARACTERIZATION OF RF AND DC MAGNETRON REACTIVE SPUTTERED TiO2 THIN FILMS FOR GAS SENSORS

R. YORDANOV, S. BOYADJIEV, V. GEORGIEVA Department of Microelectronics, Technical University of Sofia, 8 Kl. Ohridski Blvd, 1756, Sofia, Bulgaria Budapest University of Technology and Economics, Department of Inorganic and Analytical Chemistry, Technical Analytical Chemistry Research Group of the Hungarian Academy of Sciences, H-1111 Budapest, Műegyetem rakpart 4, Hungary Institute of Solid Sta...

متن کامل

Characterization of Magnetron Sputtered Coatings by Pulsed Eddy Current Techniques

A method that uses induced pulsed eddy currents for characterization of thick magnetron sputtered Nb coatings on steel is presented in this paper. The objectives of this work are to develop a system for rapid quantitative nondestructive inspection of coatings as well as to determine the correlation between coating properties, such as density and purity, and eddy current measured resistivity of ...

متن کامل

Characterization of bias magnetron sputtered tantalum oxide films for capacitors

Tantalum oxide films have been deposited by sputtering of tantalum target in an oxygen partial pressure of 2x10 mbar under various substrate bias voltages in the range from 0 to -150 V on glass and silicon substrates held at room temperature. The influence of substrate bias voltage on the chemical binding configuration, crystallographic structure, electrical and dielectric properties has been s...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: INTERNATIONAL JOURNAL OF RESEARCH IN ENGINEERING & SCIENCE

سال: 2019

ISSN: 2572-4274

DOI: 10.26808/rs.re.v3i4.03